0.05 μm, monitoring particle contamination in ultrapure water, directly connected to the pure water supply line, inline type.
Semiconductor manufacturing plant pure water plant sending for particle count monitoring Keeping the pure water in the process line always clean.
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basic information
■ Measurement particle size range: 0.05 μm to 0.2 μm (simultaneous measurement of 10 particle sizes) ■ Measurement particle size can be arbitrarily set via the controller ■ Supports high pressure up to 500 kPa (gauge pressure) ■ Standard equipped with D/A converter (4-20 mA) and alarm output contacts
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Semiconductor manufacturing plant ultrapure water plant delivery Semiconductor manufacturing plant process line circulation system Semiconductor manufacturing plant cleaning tank circulation line
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Company information
A group of acoustic measuring instruments such as sound level meters and vibration meters, particle counters essential for cleanliness management, seismic measurement systems including earthquake meters for disaster prevention and control, as well as ultrasound diagnostic devices, have expanded the product fields centered on welfare and environmental issues. Through a long accumulation of technology and a continuous challenge to new technologies, we contribute to the enhancement of social welfare, safe living, and technological innovation.
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