Improve counting efficiency to 10% and measure 0.05 μm in liquid with high sensitivity.
From pure water to hydrofluoric acid Measurement of particle counts in all cleaning solutions for wafers Measurable from 0.05μm
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basic information
■ Measurement particle size range: 0.05 μm to 0.2 μm (simultaneous measurement of 10 particle sizes) ■ Measurement particle size can be set arbitrarily from the controller ■ Built-in liquid leak sensor. Outputs an alarm when a liquid leak occurs inside the main unit ■ Sapphire used in the cell ■ Technology adopted to enhance particle size resolution (patented)
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Applications/Examples of results
Semiconductor manufacturing plant Wet cleaning line Semiconductor manufacturing plant Chemical acceptance inspection line Chemical manufacturing company Production line, shipping inspection line, etc.
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Company information
A group of acoustic measuring instruments such as sound level meters and vibration meters, particle counters essential for cleanliness management, seismic measurement systems including earthquake meters for disaster prevention and control, as well as ultrasound diagnostic devices, have expanded the product fields centered on welfare and environmental issues. Through a long accumulation of technology and a continuous challenge to new technologies, we contribute to the enhancement of social welfare, safe living, and technological innovation.
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