There are no restrictions on the installation direction, allowing for installation that aligns with surrounding conditions and design concepts.
The MARATHON CP-20 CRYOPUMP has no oil present in the exhaust system, eliminating reverse diffusion. The oil from the roughing pump used before startup can also be set to a high crossover pressure, so there is no concern about reverse diffusion, achieving a clean vacuum essential for advanced industries. You can choose from mounting flanges of ISO500, ANSI 20", or wire seal flanges. An optional system with automatic regeneration control is available. For more details, please contact us or refer to the catalog.
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basic information
【Specifications】 ○ Nitrogen (L/s) 9,700 ○ Water (L/s) 29,100 ○ Argon (L/s) 8,300 ○ Hydrogen (L/s) 14,000 ○ Argon throughput (Torr - L/s) 11.3 ○ Argon exhaust capacity (Std L) 6,000 ○ Hydrogen exhaust capacity (Std L) 33 ○ Crossover (Torr - L) 400 ○ Cool down time (minutes) 190 ○ Pump unit weight (kg) 77 ○ H dimension (mm) 569 ○ Maintenance cycle (hours) 13,000 【Delivery Scope (Standard Configuration)】 ○ CP-20 Cryopump ○ Helium compressor (F-70L/H) ○ 3M flexible gas hose ○ 3M cold head cable ○ Wrench kit for gas hose connections ● For more details, please contact us or refer to the catalog.
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Company information
NAGASE Techno Engineering Co., Ltd. (abbreviated as NTE) was established in 1983 as a machinery service company of Nagase & Co., Ltd. and changed its name to the current one in 2009. It is the core company for equipment development and maintenance services within the Nagase Group and is expanding its business globally. Our company operates three main businesses: the sale and maintenance of low-temperature and vacuum-related equipment used in the semiconductor and medical fields, a Chemical Management System (CMS) for the recycling of chemicals used in the manufacturing of semiconductors and LCD panels, and a surface defect inspection device (SCANTEC) for inspecting optical and functional films and sheets. We aim to strengthen our global engineering services by leveraging the Nagase Group's network that spans overseas. Furthermore, as a new challenge, we will utilize our high engineering expertise in the agricultural sector to benefit customers outside of domestic manufacturing.
