Flow meter Liquid mass flow meter/controller "μ-FLOW"

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last updated：Jun 09, 2022

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Mass flow meter/controller for liquids developed for ultra-low flow range "μ-FLOW"

The liquid mass flow meter/controller "μ-FLOW" is a liquid mass flow meter/controller developed for ultra-low flow ranges. The measurement principle of the instrument is thermal and it is a through-flow type. The flow meter is connected to a control valve to form a control loop. Flow control is completed by integrating the liquid flow meter and the control valve into a single body. The control valve is equipped with a purge mechanism that is used to remove trapped gases or air during startup. The control function is built into the standard circuit of the flow meter. For more details, please download the catalog.

Related Link - https://www.bronkhorst.com/ja-jp/products-jp/liqui…

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basic information

**Features** ○ No moving parts (meter) ○ Through-flow (no bypass) type ○ No influence from installation position ○ High-speed response, high precision ○ Very small volume ○ Provides continuous and stable control in combination with a control valve ○ Analog signal, digital (standard RS232, optional Profibus-DP R, DeviceNetTM, Modbus, EtherCAT or FLOW-BUS) ○ Stainless steel sensor ○ New product: 100MPa (1000 bar or 5000 psi) LFM, flow range: 100–450 mg/h FS (H2O based) ● For more details, please contact us or download the catalog.

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Applications/Examples of results

【Applications】 ○ Semiconductor field ○ HPLC applications ○ Chemical field ○ Food and pharmaceutical field ○ Analytical instrument field ● For more details, please contact us or download the catalog.