Metal seal type mass flow/pressure meter/controller

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Metal seal

last updated：Jun 09, 2022

Official site

For applications in the semiconductor industry and high-purity gases. Long-term leak-tightness guaranteed by patented metal/metal sealing mechanism!

Introducing the metal seal digital mass flow/pressure meter/controller. The equipment features a high-quality surface finish and a modular concept structure, ensuring long-term leak tightness. This unit is equipped with a PC board that offers high precision, excellent temperature characteristics, and fast response. The latest EL-FLOW series also includes multi-gas/multi-range capabilities, providing optimal flexibility and process efficiency for (OEM) customers in their applications. For more details, please download and view the catalog.

Related Link - https://www.bronkhorst.com/ja-jp/products-jp/gas-f…

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basic information

**Features** - Long-term leak tightness guarantee (against atmosphere) due to patented metal/metal seal mechanism - Electric polished gas contact parts - High-speed response and high repeatability - Flow range: 0.1...5 sccm to 0.6...100 slm N2 based (high flow available upon request) - Multi-gas/multi-range functionality - Low pressure loss, or vacuum application possible (optional) - Pressure meter/controller range: 0.1...5 to 18...900 psi - Surface mountable (optional) - RoHS compliant ◎ You can view detailed specifications and more by downloading the catalog. If you are interested, please download the catalog for more information.