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  4. Investigation, testing and inspection
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  6. Wafer Inspection Device

Wafer Inspection Device

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W-AID series, E-AID series

last updated:Jul 23, 2019

大日商事
大日商事
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Please make use of this for the standardization and automation of your inspection processes!

Not only can we detect minute defects (foreign substances, scratches, etc.) that occur on transparent substrates such as sapphire, which have traditionally been difficult to inspect, but we can also automate and standardize the inspection process that has previously shown significant variability when done by the naked eye.

    Non-destructive testing
ウエーハ外観検査装置 写真.JPG

Wafer Inspection Device

ウエーハ外観検査装置 写真.JPG
ウエーハ外観検査装置 写真.JPG
  • Related Link - http://www.dainichi-shoji.co.jp/

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basic information

(Inspection Target Examples) Various substrates such as silicon and compound wafers, sapphire, and quartz glass. (Inspection Items Examples) □ Microcracks (front and back surfaces, edges) □ Damage such as chipping, scratching, and pitting □ Foreign objects and pattern misalignment, etc. (Main Features) 1. Equipped with cameras on both top and bottom, achieving high-speed throughput with a double-arm function. 2. Automatic differentiation between good and defective products. 3. Capable of measuring warped wafers. 4. Customized systemization according to required specifications. □ Supports both research and mass production. *If you prepare the target work, we will take sample images.

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Applications/Examples of results

(Application and Achievements) Various substrates such as silicon and compound wafers, sapphire, and quartz glass (Examples of Applicable Processes) □ Inspection of the plating surface after etching □ Appearance inspection of chips after dicing (scratches on the pattern surface, etc.) □ Pre-shipment inspection and incoming inspection, etc.

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Model number overview
W-EID Device for the front and back surfaces of wafers
E-AID Device for the edge end face of wafers

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Wafer Appearance Inspection Equipment "W-AID, E-AID" Product Catalog

Wafer Appearance Inspection Equipment "W-AID, E-AID" Product Catalog

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大日商事

大日商事

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Dai Nichi Shoji Co., Ltd. was founded in 1959 as an import trading company and has been providing products such as temperature sensors, plastic products, consumable materials, and equipment for the electronics (semiconductor and LCD) industry. In 1997, we established a plastic molding factory in Yonezawa City, Yamagata Prefecture, and established a corporate structure that combines trading and manufacturing functions. At the core of our operations is our "spirit of challenge" to respond quickly to customer needs and problem-solving, as well as our commitment to manufacturing. To survive in the rapidly changing electronics industry, we will continuously anticipate market demands and diligently strive to provide excellent technology and high-quality products, aiming to be a company trusted by society.

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