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Silicon etching

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last updated:Nov 12, 2020

フォトプレシジョン
フォトプレシジョン
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Silicon etching

Introducing Photoprecision, a company that contributes to prototyping and development in various fields, including microelectronics and optics, with photofabrication as its core technology. "Silicon Etching" Overview A technology that corrodes the silicon substrate itself to form three-dimensional structures. ■□■ Features ■□■ ■ Utilizes the crystal orientation of silicon to achieve flat-walled grooves (anisotropic etching). Can form V-shaped and rectangular grooves. ■ Depending on the type of etching solution, rounded edges can be created on the groove walls, allowing for isotropic etching as well. ■□■ Types of Processing ■□■ ■ V-Groove Processing - Using silicon material with a <100> surface orientation, V-shaped grooves are formed. - The angle of the slope remains constant (54.7°). ■ Rectangular Groove Processing - Using silicon material with a <110> surface orientation, rectangular grooves are formed. - Due to the crystal structure, the orientation of the grooves tilts at 54.7° to the side. ■ Isotropic - Etching progresses uniformly in all directions. ■ For more details, please download the catalog or contact us.

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Silicon etching

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Introducing Photoprecision, a company that contributes to prototyping and development in various fields, including microelectronics and optical products, with photofabrication as its core technology. "Silicon Etching" Overview A technology that corrodes the silicon substrate itself to form three-dimensional structures. ■□■ Features ■□■ ■ Utilizing the crystal orientation of silicon, it enables the creation of groove processing with flat groove walls (anisotropic etching). V-shaped and rectangular grooves can be formed. ■ Depending on the type of etching solution, rounded edges can be created on the groove walls, allowing for isotropic etching as well. ■□■ Types of Processing ■□■ ■ V-Groove Processing - Using silicon material with a <100> surface orientation, V-shaped grooves are formed. - The angle of the slope is always the same (54.7°). ■ Rectangular Groove Processing - Using silicon material with a <110> surface orientation, rectangular grooves are formed. - Due to the crystal structure, the direction of the grooves tilts at 54.7° to the side. ■ Isotropic - Etching progresses equally in all directions. ■ For more details, please download the catalog or contact us.

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Applications/Examples of results

■□■Applications■□■ ■Fiber array ■Devices for MEMS (mirrors) ■Microdevices, etc.

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Photo Precision Co., Ltd. is a company that contributes to prototyping and development in various fields, including microelectronics and optical products, with photofabrication as its core technology. Next-generation industrial core products such as MEMS (Micro Electro Mechanical Systems), biochips, and microchemical chips are formed by the complex application of technologies such as nanotechnology, three-dimensional micromachining, high-density three-dimensional packaging, and three-dimensional photolithography. Photofabrication is deeply involved in all of these technologies and serves as the foundational technology for MEMS development. We strive for continuous technical refinement with the support of our customers, while also introducing advanced equipment as much as possible to meet the diverse needs of our clients.

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