A lineup of auto-aligner devices capable of fully automatic comprehensive exposure.
We have lined up an auto-aligner device equipped with a one-sided mask aligner and a cassette-to-cassette transport system, optimal for research and development as well as small to medium lot manufacturing, used in the exposure processes of various devices and sensors, including semiconductors, enabling fully automated comprehensive exposure.
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We have introduced an auto-aligner device equipped with a one-sided mask aligner and a cassette-to-cassette transport system, optimized for research and development as well as small to medium lot manufacturing, suitable for exposure processes used in various devices and sensors, including semiconductors, enabling fully automated comprehensive exposure. 【One-Sided Mask Aligner】 This device is used for exposure in various device fields, including semiconductor devices and various sensors. It is optimal for research and development as well as small to medium lot manufacturing. The light source ranges from 250 kW to 5 kW, and exposure sizes are available up to 200 mm in diameter. 【Auto-Aligner Device】 This device is a fully automated comprehensive exposure system equipped with a cassette-to-cassette transport system. It is designed as a mass production aligner for various devices, establishing a loader and unloader transport system to increase production volume. *For more details, please download the catalog and request information.
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For over half a century, we have continuously refined our technological and product capabilities. By integrating Ushio's unique proposal power with these strengths, we provide solutions that pave the way for the next generation to society and the market. In the business domain of light and industry, where further evolution is anticipated, we will maximize all our capabilities to contribute to the development of our customers and society.
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