【Product Information】Wafer Surface Defect Inspection System 'Laser Explorer'

Transparent wafers can also be inspected at high speed! High-output lasers detect tiny scratches and particles!
The 'Laser Explorer' is the latest wafer surface defect inspection device that supports transparent wafers.
High-output lasers detect minute defects such as scratches, pits, and particles! It can be utilized for shipping and receiving inspections of wafers, as well as for quality control in the epitaxial process!
【Other Features】
■ High throughput (inspects 25 wafers in a cassette in about 40 minutes)
■ Discriminates the unevenness of defects
■ Automatic focus for all samples
■ Customization support
■ Automatic inspection for one cassette
■ High-precision marking for defects (optional)
■ Defect review using a laser microscope (optional)

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