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  3. テルモセラ・ジャパン
  4. Wafer Annealing Equipment [ANNEAL] Max 1000℃ APC Automatic Pressure Control MFC x3 System Compatible with Φ4 to 6 inch Substrates
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  • Oct 15, 2024
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Oct 15, 2024

Wafer Annealing Equipment [ANNEAL] Max 1000℃ APC Automatic Pressure Control MFC x3 System Compatible with Φ4 to 6 inch Substrates

テルモセラ・ジャパン テルモセラ・ジャパン
Max 1000℃, MFC up to 3 systems, APC pressure control, compatible with substrates from 4" to a maximum of 6", high vacuum annealing device (<5 × 10^-7 mbar) [ANNEAL] is a research and development annealing device capable of high-temperature heat treatment of substrates such as wafers in a stable process atmosphere. It allows high-temperature processing up to 1000℃ through a heating stage installed in a high vacuum water-cooled SUS chamber. A heat shield is installed inside the chamber to ensure safety with interlocks. The mass flow controller can be expanded to a maximum of 3 systems, enabling firing operations at precisely adjusted process gas pressures (APC automatic process control system option). Additionally, there are many options available, including a front view port, dry scroll pump, special substrate holder, and additional thermocouples. The heating stage inside the chamber has three variations depending on the process gas atmosphere and treatment temperature: - Halogen lamp heater: Max 500℃ - C/C composite heater: Max 1000℃ (only in vacuum or inert gas) - SiC coating heater: Max 1000℃ (in vacuum, inert gas, O2)
Product image of ANNEAL wafer annealing equipment.
Product image of ANNEAL wafer annealing equipment.
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ANNEAL_2022.pdf[2105434]

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Thermocera Japan ANNEAL Page
Developed and manufactured by Moorfield Nanotechnology Ltd (UK) http://moorfield.co.uk/anneal/
ANNEAL Equipment Introduction Video Site
ANNEAL Equipment Introduction Video Site

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MiniLab-SA125A Multi-Target Magnetron Sputtering System

High-performance multi-sputtering device 6-element multi-sputter (for Φ4 inch) 4-element multi-sputter (for Φ6, 8 inch)

Continuous multilayer film, simultaneous film formation (2-6 elements simultaneous film formation: RF, DC can be freely switched from HMI) High-power RF, DC power supplies, and pulse DC power supplies can be flexibly configured for multi-cathode using our unique 'Plasma Switching Relay' module, allowing for versatile applications. High-temperature substrate heating stage (double jacket water-cooled) options: -1) Max 600℃ (lamp heating) -2) Max 1000℃ (C/C composite) -3) Max 1000℃ (SiC coating) Reverse sputtering stage inside the load lock: -1) 300W, or -2) Soft-Etching (<30W) System main control: 'IntelliDep' control system Windows PC (or TP HMI) interface All operations are centrally managed from a single HMI screen.

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Multivariate Multi-Sputtering Device [MiniLab-S125A]

High-performance multi-sputtering device 6-element multi-sputter (for Φ4 inch) 4-element multi-sputter (for Φ6, 8 inch)

Continuous multilayer film, simultaneous film formation (2-6 element simultaneous film formation: RF, DC can be freely switched from HMI) High-power RF, DC power supplies, and pulse DC power supplies can be flexibly configured in multi-cathode arrangements using our unique 'Plasma Switching Relay' module, allowing for versatile applications. High-temperature substrate heating stage (double jacket water-cooled) options: -1) Max 600℃ (lamp heating) -2) Max 1000℃ (C/C composite) -3) Max 1000℃ (SIC coating) Reverse sputtering stage in load lock: -1) 300W, or -2) Soft-Etching (<30W) System main control: 'IntelliDep' control system Windows PC (or TP HMI) interface All operations are centrally managed from a single HMI screen.

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PyroMini USB - USB-connected compact infrared temperature sensor

USB-connected compact infrared temperature sensor, no power supply needed, powered by USB bus power from a PC, parameter settings and data management with the included dedicated software.

【Overview】 Install the standard accessory "Calexsoft," and then simply connect it to a Windows PC via a USB cable. You can easily set measurement parameters, conduct measurements, and analyze/export results in CSV format on your PC with a plug-and-play feel. USB output operates solely on USB bus power when connected to a PC, requiring no additional power supply. This expands its application range in various industrial fields and research laboratory experiments. 【Features】 ◎ USB data logging ◎ Wide range: -20°C to +1000°C ◎ Excellent basic performance: accuracy ±1%, reproducibility ±0.5%, 125 msec fast response ◎ Emissivity adjustment range: 0.2 to 1.0 ◎ Measurement wavelength range: 8 to 14 μm ◎ Compact size Φ18mm x 45mm

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【PyroUSB】USB-connected high-precision infrared temperature sensor

USB connection type, parameter setting and data management with the included dedicated software. A wide range of wavelength options is available. Three models can be selected based on your purpose.

【Overview】 Connect to a Windows PC using the standard accessory "CalexConfig" and the included USB cable (1.8m), allowing for the configuration of sensor measurement parameters, analysis of measurement results, and CSV output on the PC. 1) 4-20mA output 2) USB output (operates on USB bus power) 3) Simultaneous use of 4-20mA/USB output These three usage methods are available. 【Features】 ◎ Simultaneous use of USB data logging and 4-20mA analog output ◎ Excellent basic performance: accuracy ±1%, reproducibility ±0.5%, 200msec fast response ◉ PUA2: Covers short wavelengths from 2.0 to 2.4μm, capable of measuring metal surfaces ◉ PUA5: Suitable for measuring glass surfaces at a wavelength of 5μm ◉ PUA8: General-purpose, applicable to a wide range of materials such as paper, wood, plastic, and textiles at a wavelength of 8-14μm

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PyroCouple Infrared Temperature Sensor

Compact measurement, robust body, high precision ±1%, 240msec high response. It can be applied for various purposes such as industrial machine control and temperature monitoring in production sites.

**Overview** The "PyroCouple" from UK-based Calex Electronics is a compact, lightweight, low-cost, and high-performance infrared temperature sensor unlike any other. It can non-contact measure the surface of objects that are "moving," "rotating," or "cannot be touched," allowing for fast and highly reproducible temperature control. **Features** ◎ Integrated amplifier and sensor ◎ 4-20mA output (standard), 0-50mV, thermocouple K, J, T output (optional) ◎ Accuracy: ±1% or ±1℃ (whichever is larger) ◎ Reproducibility: ±0.5% or ±0.5℃ (whichever is larger) ◎ Response time: 240msec ◎ Protection rating: IP65

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PyroMini Small High-Performance Infrared Temperature Sensor

Easy setup with a high-performance touch panel converter, data logging, and data storage on a microSD card. PM2.2 measurements can also be taken on glossy metal surfaces.

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【PyroNFC】Smartphone-configured infrared radiation temperature sensor

Parameters such as temperature range, emissivity, and alarms can be set using a smartphone or tablet, allowing for easy configuration without the need for a display instrument or power supply for the instrument.

● You can use a smartphone or tablet to perform the settings. ● Download the dedicated app for free from Google Play (Android 4.1 to 5.1). ● Using Android's NFC communication, simply touch the sensor part to read and write data. ● Ultra-compact sensor (Φ31mm x t29mm) allows temperature measurement in narrow spaces. ● Fast response time of 125 msec, high accuracy of ±1.5%. ● Voltage output (0-5V or 0-10V), or K thermocouple output.

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ExTemp intrinsic safety explosion-proof infrared radiation temperature sensor

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CCS3 product photo

The new product "Vehicle Count Sensor CCS3" enables efficient occupancy management of large parking lots.

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Hotron Inc. has launched its new product, the "Vehicle Count Sensor CCS3"! This product is a ceiling-mounted sensor that combines infrared and radar technology. It reliably detects vehicles in both directions with a single unit, accommodating traffic during congestion and vehicle passing, thus achieving efficient occupancy management in large parking lots. Additionally, it can be utilized for exit warning purposes in addition to vehicle counting, contributing to the safe and smooth operation of parking facilities. 'Features' - Improved detection performance against changes in road surface during rainy weather by using both infrared and radar. - Equipped with IP67 waterproof and dustproof performance, making it effective even in salt damage areas. - Various settings can be configured from a dedicated app (for Android devices), with current settings easily visible at a glance. - The base dimensions are the same as the previous model "CCS2," allowing for smooth replacement of existing equipment. *For more details, please refer to the product information, catalog download, or contact us.*

Oct 15, 2026

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[Video Manual Guide] We will explain in an easy-to-understand video how to connect the wireless set that links the bed exit sensor and nurse call system!

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Hotron, which manufactures and sells sensors, provides bed exit sensors for hospitals, nursing, and care facilities. Hotron offers easy-to-understand video guidance on how to use bed exit sensors wirelessly and how to set up device connections! ▼ Video Manual (YouTube) https://www.youtube.com/playlist?list=PLNVA4mTrZDqtJa6MfFRZQxwtfCSnAfxVy 【Bed Exit Sensors】 ○ Non-contact infrared sensor, simply place it - Pole-kun HB-H1 ○ Mat sensor, foldable thin mat - Mat-kun HB-UST ○ Body movement call - Ugo-kun HB-TV3 ○ Body movement call for wheelchairs - Ayumi-chan HB-WTV3 【Options】 ○ Nurse call linked wireless set - Wireless set (transmitter/receiver) HB-RS/HB-RJ ◎ For more information about the products, please contact us or download the catalog.

Oct 15, 2026

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HK-2

Recommended for earthquake measures for automatic doors and equipment! Seismic device HK-2.

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Japan is one of the top 10 countries in the world with frequent earthquakes. The 2020 White Paper on Land, Infrastructure, Transport and Tourism has also reported an increase in the probability of major earthquakes occurring. Regarding the Nankai Trough earthquake, the probability of an earthquake with a magnitude of 8 to 9 occurring within the next 30 years is estimated to be 70 to 80%. At Hotron, we recommend the introduction of seismic devices for earthquake countermeasures in buildings and equipment. The seismic device 'HK-2' is a product that automatically performs various controls that have been pre-set when it detects strong shaking equivalent to a seismic intensity of 5 lower or higher. For example, it can automatically execute actions such as: "Open automatic doors and gates to secure evacuation routes and access for emergency vehicles" "Transmit signals to the control room and stop facility equipment" "Unlock the keys to locked lockers" "Automatically play voice guidance" For more details, please download the materials or contact us.

Oct 14, 2026

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399_While pretending to be polite, persistently bombard the other person with questions to exhaust them!? 'Sea Lioning'

"SBS Marketing Co., Ltd." While pretending to be polite, relentlessly bombarding the other party with questions to exhaust them!? 'Sea Lioning'

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Oct 13, 2026

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"Blink Detection SDK ver.1.1.0" now available - C#/.NET compatible, 4 platforms, 8 sample applications.

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We have started offering the latest version 1.1.0 of the "Blink Detection SDK," which detects blinking from the state of eye opening and closing using only a PC's webcam or a smartphone camera. The face detection model has been updated to the lightweight and fast YuNet, and it supports usage from C#/.NET (verified to work with .NET 8). The same version is provided across four platforms: Windows, Linux, iOS, and Android, and it includes eight sample applications for each platform. It can process quickly using only the CPU without the need for a GPU, making it useful for integration into products and services for features like eye strain prevention alerts and touchless operations. A one-month free trial version (SDK/Windows app/smartphone app) is available.

Oct 13, 2026

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