SCREEN SPEサービス List of Products and Services

The new technology "Heat Pump Dynamics" not only recovers heat from outside air using heat pump technology but also utilizes proprietary technology to recover and merge waste heat within the unit, generating a powerful heat pack. It is fully utilized in coolers, heaters, and humidifier heaters. In medium to large air conditioning systems, the need for separate heat source units (refrigerators, boilers, electric heaters) is eliminated, reducing electricity consumption and running costs. Efforts are being made to consider the environment through air conditioning systems towards achieving carbon neutrality by 2050. 【Features】 ■ Capable of reducing electricity consumption and running costs by up to 80% compared to conventional systems (according to our estimates). ■ Flexible system configuration for various target areas through combinations of air conditioning unit models. Models for small-scale areas are also available. ■ Promotes a green environment by eliminating fossil fuel use through boiler-less operation and reducing direct CO2 emissions. ■ Precision air conditioning that achieves high-accuracy temperature and humidity control. ■ In medium-sized models, it can be utilized in various scenarios in conjunction with clean booths. *For more details, please refer to the materials. Feel free to contact us with any inquiries.

• Air conditioning equipment

Airflow purification for infection control / Dust control! = A safer environment with push-pull airflow purification! = Reduces infection risk for healthcare workers. Alleviates concerns about dust accumulation in small workspaces. The airflow created by the blower (exhaust) and the suction device (intake) purifies the space with gentle air currents. = Partition type for flexible layout! = Can be installed in various locations without looking out of place. Easy to move with casters. No construction required, allowing for spot installation in necessary areas, enabling low-cost environmental creation tailored to the situation. Clean partition with HEPA filter! <Features> * High dust collection performance with HEPA filter * Flexible purification of any space with dual blower and suction setup * Three levels of airflow settings tailored to usage * Partition type that blends well with living environments * Compatible with standard household power outlets for immediate use * Eligible for subsidies under the Ministry of Health, Labour and Welfare's "Facility and Equipment Improvement Costs for Health and Hygiene Facilities" * Please check with your local municipality for details.

• Ventilation and smoke exhaust equipment

We offer "equipment modification and EOL parts repair services" to support the continued operation of devices that are difficult to procure parts for or repair, with various proposals. Typically, for parts repair, we respond based on parts replacement, repair, alternative parts replacement, and equipment modification. However, if repair is difficult even with these responses, we provide support for "parts repair" that have been discontinued. We will do our best to ensure the equipment can continue to operate. 【Features】 ■ Support for long-term continued operation of devices that are difficult to procure parts for or repair ■ Accurate response to changes in the equipment environment over time *For more details, please refer to the PDF document or feel free to contact us.

• maintenance

This service is a technical service plan designed to ensure the stable use of SCREEN equipment over the long term. Experienced technical specialists will diagnose your currently used equipment and propose a suitable "Equipment Refresh Menu." Additionally, we offer a "Simple Inspection Equipment Diagnosis" service for easily checking the current condition of your equipment. 【Features】 ■ Achieve long-term stabilization of production lines through equipment refresh ■ Realize optimization and stable operation of equipment with effective pre-maintenance ■ Significantly suppress performance degradation over time ■ Check the condition of the equipment and suitable maintenance programs *For more details, please refer to the PDF document or feel free to contact us.

• Security Assessment

Sebapron" is a chemical-resistant apron worn over work clothes and dust-proof suits. Essential for hazardous chemical work! It is standardly adopted by many semiconductor-related companies and chemical handling businesses. A "one-piece design" that balances safety and work efficiency. The leg portion is pants-type, ensuring safety around the feet during low-height work. Made from materials that excel in chemical resistance and breathability, significantly reducing stress for the worker. Combining it with a "hood" and "over-shoes" made from the same chemical-resistant fabric is also effective. The soft fabric improves the burden of work in tight spaces. 【Features】 ■ High chemical resistance against hazardous chemicals (see attached data) ■ Made from breathable PTFE material, reducing stress ■ "One-piece design" considering safety and work efficiency ■ The "SEBAPRO-Hi Lab" with a chef's coat design fits laboratory environments ■ Effective when combined with "hood" and "over-shoes

• Work tools

The performance of the hot plate is a crucial factor that determines the accuracy of the photolithography process. In particular, in advanced processes that require high uniformity of film thickness, line width, and film quality, as well as in process development involving materials with high temperature dependence, the performance of the hot plate becomes a significant factor in assessing process performance. The timer-controlled pin-up mechanism enables precise time management, allowing for uniform thermal treatment between wafers. In addition to the standard 250°C model, a high-temperature 350°C model is also available. Furthermore, if uniform cooling is required before and after processing, a tabletop cool plate can also be utilized. 【Features】 ■ High precision in in-plane temperature uniformity. ■ Timer control reduces wafer-to-wafer variation. ■ Compatible with 3 to 8-inch wafers. ■ Proximity balls ensure a uniform gap. ■ The high-temperature 350°C model is equipped with a burn prevention cover. ■ Tabletop cool plates with air cooling and water cooling are also available. *For more details, please refer to the PDF materials or feel free to contact us.

• others

The "Clean Bench" easily secures a clean working space. It is equipped with two types of airflow: a horizontal flow that moves clean air from the front to the back, and a vertical flow that descends from the ceiling. It maintains Class 100 cleanliness in the workbench area. It is effective for performing table work in a clean environment or temporarily placing parts in a clean environment. 【Features】 ■ Easily secures a clean working space ■ Two types of airflow: horizontal flow and vertical flow ■ Concentrated maintenance of Class 100 cleanliness in the workbench area *For more details, please refer to the PDF document or feel free to contact us.

• Clean Room

The "Simple Clean Booth" is an assembly-type clean booth suitable for securing areas for the production, assembly, packaging, and inspection of precision equipment. With a workbench equipped with a 100V outlet, no electrical work is required. It can be set up in about one hour to create a clean space with a class of 1,000 to 10,000. Additionally, it is lightweight and easy to move. If it is no longer needed for a certain period, it can be disassembled and stored. It is ideal for semiconductor factories, LCD, solar cell, and electronic circuit board manufacturing lines, as well as chemical manufacturing lines, measurement equipment environments, and high-precision special printing environments that require a clean environment. 【Features】 ■ Equipped with HEPA (dust collection efficiency of 99.97% or higher) in the FFU ■ Significantly lightweight due to the aluminum casing, making it easy to move ■ Available in various sizes ■ Optional addition of LED lighting with an ionizer ■ Costs about half compared to conventional clean booths *For more details, please refer to the PDF document or feel free to contact us.

• Clean Room

The "Clean Booth" allows for the construction of a clean room environment at a low cost. It is capable of setting up clean room environments ranging from Class 100 to 10,000. With connected usage, it can accommodate a larger clean room environment and layout changes. It is overwhelmingly low-cost compared to a full-scale clean room. It is ideal for semiconductor factories, LCD, solar cell, and electronic circuit board manufacturing lines, as well as chemical manufacturing lines, measurement equipment environments, and high-precision special printing environments that require a clean environment. 【Features】 - Equipped with HEPA (dust collection efficiency of 99.97% or higher) in the FFU - Lightweight steel frame with high strength, allowing for mobility with the included casters - Vinyl curtains are available in anti-static specifications, with options for transparent, yellow, and darkroom types - Installation of ionizers and air showers at entrances is also possible - Design and processing can be customized according to your requirements *For more details, please refer to the PDF materials or feel free to contact us.

• Clean Room

The "JH-72S-SBX/JH-96S-SBX/JH-144S-SBX" is a pure water heating unit that heats and pressurizes pure water for supply. It achieves space-saving through a 2-in-1 design. Additionally, with its pressurization function, it can be installed in sub-fabs, creating space in clean rooms. Thanks to its unique quartz tank structure and control mechanism, it features a quick heating startup and energy-saving design. It is compact and does not take up much space, and with the pressurization function, it can provide stable supply without being affected by pressure fluctuations on the primary side, even in environments where pure water pressure is insufficient. We offer a wide range of products, including pure water heating units without the pressurization function. 【Features】 ■ Equipped with a pressurization function (optional) ■ Can be installed in limited spaces ■ Contributes to reducing investment costs ■ Energy-saving design with quick heating startup due to unique quartz tank structure and control mechanism ■ Clean design using quartz glass for the heating container and fluororesin for the main piping sections *For more details, please refer to the PDF document or feel free to contact us.

• Hydrogen storage and supply

By introducing a pure water booster unit, we can eliminate issues related to insufficient or fluctuating pure water supply pressure! This enables stable process handling. The stable supply of pure water is a critical factor that affects quality and yield in device production. This boosting function can also be integrated into static electricity prevention units and pure water heating units, allowing for a reduction in installation space. 【Features】 ■ Control of stable pressure through feedback functionality with constant monitoring. ■ Adoption of a magnetic levitation centrifugal Levtronics pump without bearings, achieving high durability. ■ Realization of stable supply without pulsation. ■ A range of product models available to accommodate various supply flow rates. ■ Compatibility with the communication specifications of the supplying devices. *For more details, please refer to the PDF materials or feel free to contact us.

• Water Treatment

From optimizing and modifying process equipment to providing various peripheral devices within the factory, we contribute to the stable operation and productivity improvement of our customers' manufacturing lines. In recent years, with the high performance and diversification of electronic devices, the optimization of the manufacturing environment has become increasingly important. SCREEN SPE Services is advancing the proposal of reliable solutions based on the technical information shared within the SCREEN Group. For more details, please contact us or download the catalog.

• Heating and cooling equipment and facilities