GasPro All- fluoropolymer Gas Filter TEM-1200
This is a high-performance inline gas filter for semiconductor gas filters, with a filtration accuracy of 0.003 microns.
The GasPro filter is specially designed for semiconductor gas filtration. It features an all-welded structure that achieves a filtration precision of 0.003 microns, even in situations where high flow rates are required and space is limited. The media material is PTFE, and the welded housing is made of electropolished SUS316L. To ensure cleanliness, it is purged with filtered nitrogen before shipping. Various connection types are available for easy installation.
- Company:エア・ウォーター・メカトロニクス株式会社 ST事業部
- Price:Other