[Analysis Case] Magnetron Sputtering Simulation
Simulation of atomic behavior within a magnetron sputtering device using the particle-based plasma analysis software Particle-PLUS.
Particle-PLUS is an excellent simulation software for numerical analysis of non-equilibrium plasma generated in rarefied gases. It can be utilized in applications such as magnetron sputtering, PVD, plasma CVD, capacitively coupled plasma (CCP), and dielectric barrier discharge (DBD). By utilizing the sputter particle module among various modules (refer to the product descriptions below), it is possible to determine the behavior of atoms sputtered from the target in plasma and neutral gas environments in magnetron sputtering devices, allowing for quick evaluation of flux distribution on opposing substrates. The analysis procedure involves using the particle and energy flux of the plasma obtained from the plasma module to determine the generation distribution and amount of sputter particles, and tracking their motion using a particle method known as the test particle method.
- Company:ウェーブフロント 本社
- Price:1 million yen-5 million yen