Ultra-thin stage adopting a groundbreaking modular structure (patented)
THK's electric actuator precision stage series CMX (alignment stage) standardizes a large stage with a top table size of 1500m x 1500m to accommodate large workpieces, and achieves ultra-thin and lightweight design through a saddle-less mechanism. Furthermore, its hollow structure makes it suitable for optical inspection devices and continuity testers. Additionally, it is used in various fields, including FPD manufacturing and inspection equipment, semiconductor manufacturing and inspection equipment, screen printing machines and mask inspection devices, printed circuit board manufacturing and inspection equipment, solar cell manufacturing and inspection equipment, and electronic device manufacturing and inspection equipment. Moreover, the related links provide detailed product descriptions, product catalogs, user manuals, specification drawings, dimension tables, 2D CAD, and a wealth of technical information. Please take a look at those as well.
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basic information
● Supports large workpieces Standardized large stage sizes up to 1500mm x 1500mm for the top table. By arranging the necessary number of modules, it is also possible to accommodate even larger sizes. ● Ultra-thin and lightweight By adopting the XYθ module, a thin and lightweight mechanism without a saddle has been realized. ● Hollow structure A large space is created in the center of the top table and base, allowing for use as an optical inspection device or continuity tester. ● High rigidity and high precision The cross LM guides and cross roller rings that make up the module are preloaded, resulting in a structure that is both highly precise and rigid.
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Company information
THK pioneered the "rolling" of linear motion components in machines in 1972 and developed the "linear motion system." The development of this "linear motion system" has led to increased precision, speed, labor-saving, and improved efficiency in machinery, enabling energy-efficient equipment design. All of THK's technology is dedicated to providing greater lightness and precision to the "movement" of various mechanisms, bringing numerous innovations to the world. 【THK's Main Product Areas】 1. Mechanical Component Parts: - Development, manufacturing, and sales of LM guides, ball splines, ball screws, electric actuators, etc. 2. Mechatronics-related Products: - Precision XY stages, linear motor actuators, etc. 3. Automotive Parts: - Link balls, rod ends, etc. 4. Robotics: - Pick and place robot "PPR," transport robot "SIGNAS," service robot "SEED-Solutions" (including display robots and temperature measurement robots), etc. 5. Seismic Isolation: - Seismic isolation table TSD, seismic isolation module TGS.
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