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  6. Electric Actuator EX (Precision Stage) [THK Official]

Electric Actuator EX (Precision Stage) [THK Official]

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Precision Stage Series EX

last updated:Apr 04, 2022

THK
THK
  • Official site

Achieves excellent responsiveness with a low-inertia structure.

The THK electric actuator precision stage series EX (XY stage) is a simple XY stage that does not use a saddle structure like conventional types. By minimizing the weight of the operating unit and reducing the inertial forces of each axis, it achieves excellent high-speed responsiveness. Additionally, the related links provide a wealth of technical information, including more detailed product descriptions, product catalogs, user manuals, specification drawings, dimension tables, and 2D CAD files. Please take a look at these as well.

    Transportation System
EX_20091103.jpg

Electric Actuator EX (Precision Stage) [THK Official]

EX_20091103.jpg
EX_20091103.jpg
  • Related Link - https://www.ea-thk.com/?q=ea_jp/node/1200&xadid=a0…

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basic information

● Simple XY Structure This is a simple XY stage that uses a cross LM guide CSR within the guide frame and does not employ a saddle like conventional XY stages. ● Excellent Responsiveness The structure using the cross LM guide CSR eliminates the intermediate saddle and adopts a special structure that also fixes the two-axis motors. This allows for extreme weight reduction of the moving parts, minimizes the inertial forces of each axis, and achieves excellent high-speed responsiveness. ● High Rigidity XY Stage By using a cross LM guide CSR with four-directional equal loading in the XY guide frame, the radial rigidity is higher compared to stages that use cross roller guides. ● Play-free Coupling Mechanism The drive unit of the X-axis integrates linear motion guidance LM guides and drive ball screws, adopting a space-saving, high-rigidity, and high-precision KR. The connection with the top table is provided with appropriate preloading using LM guide HSR, resulting in a play-free structure.

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THK pioneered the "rolling" of linear motion components in machines in 1972 and developed the "linear motion system." The development of this "linear motion system" has led to increased precision, speed, labor-saving, and improved efficiency in machinery, enabling energy-efficient equipment design. All of THK's technology is dedicated to providing greater lightness and precision to the "movement" of various mechanisms, bringing numerous innovations to the world. 【THK's Main Product Areas】 1. Mechanical Component Parts: - Development, manufacturing, and sales of LM guides, ball splines, ball screws, electric actuators, etc. 2. Mechatronics-related Products: - Precision XY stages, linear motor actuators, etc. 3. Automotive Parts: - Link balls, rod ends, etc. 4. Robotics: - Pick and place robot "PPR," transport robot "SIGNAS," service robot "SEED-Solutions" (including display robots and temperature measurement robots), etc. 5. Seismic Isolation: - Seismic isolation table TSD, seismic isolation module TGS.

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