Independently designed to be resistant to dust environments and condensation.
The "MPS Series" is a fully water-cooled microwave oscillator that incorporates a compact heat exchanger, making it resistant to dust environments and condensation. It has obtained CE certification and features a separate power supply and oscillation unit. The external control functions are also well-equipped. It supports uniform and rapid heating, making it suitable for surface treatment applications, and can be utilized in fields such as semiconductors, food, and chemicals. 【Product Lineup】 ◎ For Plasma Excitation ■ 3kW Microwave Oscillator "MPS-30W-DC-CE" ■ 6kW Microwave Oscillator "MPS-60W-DC-CE" ■ 6kW Microwave Oscillator "MPS-60W-400-CE" ◎ For Microwave Dielectric Heating ■ 6kW Microwave Oscillator "MPS-60W-AC" *For more details, please refer to the materials. Feel free to contact us with any inquiries.
Inquire About This Product
basic information
【Features】 ■ 3kW Microwave Oscillator "MPS-30W-DC-CE" - Many successful implementations in substrate ashing equipment - Generates stable plasma with low output ripple ■ 6kW Microwave Oscillator "MPS-60W-DC-CE" - Generates stable plasma with low output ripple - Input power supply: 3-phase 190V–220V 50/60Hz ■ 6kW Microwave Oscillator "MPS-60W-400-CE" - High efficiency achieved through series resonant circuit technology - Usable with 3-phase AC400V input power supply ■ 6kW Microwave Oscillator "MPS-60W-AC" - High efficiency achieved through series resonant circuit technology - Compact and high-output microwave power supply of 6kW *For more details, please refer to the materials. Feel free to contact us with any inquiries.
Price range
Delivery Time
Applications/Examples of results
*For more details, please refer to the materials. Feel free to contact us as well.*
catalog(4)
Download All CatalogsCompany information
Our core technology, "microwave," possesses specialized knowledge and know-how cultivated over many years, allowing us to provide valuable products and services uniquely developed in-house to meet our customers' needs. In recent years, our strengths in improving productivity and quality have led to adoption across many industries, including heating, drying, and chemical reactions. Please feel free to contact us for technical inquiries or estimates.