[New Product] Ultra High Purity Diaphragm Valve "ALD7"
Ultra-high purity valves for atomic layer deposition (ALD) process applications.
Achieving high-precision supply of precursors for ALD over millions of cycles. The top model in the series contributes to improving yield in semiconductor manufacturing.
The ultra-high purity diaphragm valve "ALD7" is a valve that can supply ultra-high purity fluids, such as precursors necessary for atomic layer deposition (ALD) in semiconductor manufacturing, with high precision and stability. By reducing individual differences in each product, it ensures consistency in various performance metrics such as flow rate, actuator speed, and thermal stability, demonstrating high performance across all aspects, including between valves, precursor supply, and chambers. 【Features】 ■ Compact and high-performance. Achieves low maintenance ■ Enables accurate supply of precursors over millions of cycles ■ Realizes high-speed operation with a response time as fast as 5ms ■ Excellent heat resistance with actuators rated for 150°C and valve bodies for 200°C ■ Utilizes our proprietary "316L VIM-VAR stainless steel" for the body, achieving high corrosion resistance *For more details, please refer to the materials. Feel free to contact us with any inquiries.
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basic information
【Specifications】 Flow coefficient (Cv value): 0.7 Flow variation between valves: ±1% Flow variation during cycle life (in use): 2% Response time to open and close: <5ms Consistency of actuator response: ±1ms Maximum operating temperature of actuator: 150℃ Maximum operating temperature of valve: 200℃ Height (MSM): 75.1mm Footprint (MSM): 38.1mm *For more details, please refer to the documentation. Feel free to contact us with any inquiries.
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Applications/Examples of results
The Swagelok diaphragm valve ALD7 for ultra-high purity is the latest innovation that consolidates Swagelok's valve technology for atomic layer deposition (ALD), which has supported semiconductor equipment manufacturers and tool makers for over 50 years. By using this high-performance valve for semiconductors, tool manufacturers and semiconductor equipment makers can improve the yield of manufacturing devices and enhance profitability by achieving the consistency, flow rate, operating speed, and high-temperature performance necessary to overcome the limitations of current production processes.
Company information
Swagelok Company develops and offers fluid system solutions (products, assemblies, and services). Our component products and services are beneficial to our customers' businesses and also provide safety for people working in high-risk environments. We believe that prioritizing this safety is our responsibility. Swagelok manufactures essential precision piping components (tube fittings, valves, regulators, hoses, and others) used in fluid systems across various industries, including power generation, oil and gas, chemicals, biopharmaceuticals, research and development, semiconductor manufacturing, and many others. Currently, a global network of over 200 Swagelok authorized sales and service centers supports customers using our products.