It is ideal for supplying high-purity gases (purity 99.999 to 99.99999%) and gases for semiconductors and corrosive gases.
The "SRQ-1HL・SRQ-1LL" is a pressure regulator with a two-stage decompression structure, which allows for extremely minimal fluctuations in secondary side pressure, enabling stable gas supply. It features a design that eliminates the sliding parts, reducing the generation of particles. The adoption of a waveform diaphragm achieves high sensitivity to pressure. The external seal uses an all-metal seal. Options for customization include assembly environments (Class 10000 or Class 10), cleaning (oil-free and water-free only or pure cleaning), and electropolishing (available or not), allowing for adaptation to various gas usage applications. *For more details, please refer to the catalog or feel free to contact us.*
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basic information
"SRQ-1HL/SRQ-1LL" ■ Primary side pressure (MPa): 1 to 20 / 1 to 3 ■ Secondary side pressure (MPa): 0.1 to 0.99 ■ Material: SUS316L ■ Weight: 1.3 kg ■ Standard flow rate (m³/h) ・SRQ-1HL: 160 (P1=15MPa, P2=0.99MPa) ・/SRQ-1LL: 80 (P1=3MPa, P2=0.99MPa) ■ Maximum flow rate (m³/h) ・SRQ-1HL: 200 (P1=15MPa, P2=0.99MPa) ・SRQ-1LL: 100 (P1=3MPa, P2=0.99MPa) * For more details, please refer to the catalog or feel free to contact us.
Price range
P3
Delivery Time
Applications/Examples of results
It is ideal for corrosive gases and high-purity gas supply. There are options for materials, assembly environments, cleaning, and electro-polishing, and it has a proven track record in gases for semiconductors that require extremely high purity.
Company information
Yamato Sangyo Co., Ltd. is a company located in Osaka City, Osaka Prefecture, that manufactures and sells pressure control equipment. The products handled include pressure reducing valves, pressure regulators, gas-related products, general industrial pressure regulators, analytical instrument pressure regulators, gas supply units, gas supply facility plant design and construction, and a wide range of other items. From beer foam to rockets and fuel cells, cutting-edge technology is alive and well in Japan's leading industries.
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