[Labor Accident Case] Incorrect disposal of used chemical solution resulted in the release of hydrochloric acid.
An incident where hydrochloric acid was generated due to improper disposal of waste liquid from chemicals used in a semiconductor manufacturing plant, resulting in harm to workers.
In the membrane pre-cleaning process of the manufacturing process, a mixed solution M of sulfuric acid, hydrogen peroxide, and pure water was used, while a mixed solution N of phosphoric acid and hydrochloric acid was used for the marking process. Although solutions M and N were processed separately, hydrochloric acid gas was generated when solution N was accidentally poured into the poly tank designated for collecting solution M. The hydrochloric acid gas, which erupted as white smoke from the poly tank, spread into the clean room, causing three workers inside to complain of eye pain and seek treatment. [Recommendation] ■ It is recommended to install equipment that can quickly detect the leakage of toxic gases and issue alarms. *For more details, please refer to the PDF document or feel free to contact us.
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【Case Summary】 ■Location - Clean room at a semiconductor device manufacturing plant where gallium arsenide wafers are produced. ■Countermeasures - Ensure that the waste liquid collection poly tank is securely closed, or install appropriate exhaust systems to prevent chemical vapors generated from the poly tank from leaking into the work area. *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Riken Keiki Co., Ltd. was established as a company within the "Riken Foundation" conglomerate and has since focused on the scientific and technological advancements of the Riken Institute. As a specialized manufacturer of industrial gas detection and alarm equipment, we have worked to ensure industrial disaster prevention safety by preventing explosions caused by flammable gases and monitoring harmful gases in the workplace. Moving forward, we aim for zero loss of precious human lives and valuable assets, further strengthening our technological development capabilities. We will supply high-quality industrial gas detection and alarm equipment, as well as various excellent gas sensors, to countries around the world, contributing to the assurance of industrial disaster prevention safety.
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