High-precision and precise measurement! Automatically performs OK/NG judgment for defects based on any threshold setting.
The "Scratch Inspection Device" can accommodate multiple wafers and performs fully automated visual inspections for extremely small scratches, foreign substances, and chips. It is equipped with a laser displacement meter that automatically measures the distance to the workpiece, making it independent of the wafer thickness. In addition to image recording, it automatically determines OK/NG for defects based on user-defined threshold settings. It supports a wide range of applications, including transparent materials, semi-transparent SiC, GaN, GaAs, sapphire, and silicon. 【Features】 ■ Fully automated visual inspection for extremely small scratches, foreign substances, and chips ■ Equipped with a laser displacement meter that automatically measures the distance to the workpiece ■ The standard wafer size is 4 inches, with customization options available for up to 12 inches *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■ Camera movement XY-axis stage: Stroke X 230mm, Y 306mm ■ Camera focus automatic Z-axis stage: Stroke 39mm ■ Inspection 2 million pixel monochrome (1620×1236 pixels) ■ Orifura alignment camera (2592×1944 pixels) ■ CCTV lens: f=10mm, with visible cut filter ■ LED ring lighting: Inner diameter 27mm, emission wavelength 850nm ■ Differential interference microscope tube: Objective lens 5x, with optical adjustment locking mechanism ■ Image processing computer: DELL Optiplex ■ AF laser displacement meter: Mechanism to prevent physical contact *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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At Softworks Co., Ltd., we are engaged in the development and sales of computer software. Theme = In response to conditions, we propose a solution = development of image processing software. We start with considerations of optical systems such as lighting and mechanical systems, and handle everything from interfacing with mechanical systems to the development of specific image processing software with technical consultants.