[CLA Case] Liquid Tank (Dilute Sulfuric Acid) Level Detection [Semiconductor Equipment Related]

Using the liquid level sensor "CLA"! It can detect the liquid level position and output it with an analog signal, allowing for linear liquid level management!

We would like to introduce a case of level detection in a chemical tank using the non-contact liquid level sensor "CLA," which can be installed in various tanks due to its electrodes being suitable for PET film. (Detection substance: dilute sulfuric acid) For companies related to semiconductor equipment, changing the liquid level management position requires the hassle of reattaching sensors. They faced the challenge of not knowing the liquid level position due to point-based liquid level management. Therefore, they adopted the "CLA." As a result, by allowing the setting of four detection points for the liquid level, there is no need to change the sensor position. Additionally, with analog output, the liquid level position can be detected and output, enabling linear liquid level management. 【Current Issues and Requests】 ■ Currently, four capacitive sensors are installed for liquid level management. ■ The management of the liquid level changes depending on the liquid and operating conditions. ■ We want to monitor the liquid level linearly to know its position. ■ If we want to change the liquid level management position, it requires the hassle of reattaching sensors. ■ Due to point-based liquid level management, we do not know the position of the liquid level. *For more details, please refer to the PDF document or feel free to contact us.

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