[Use Case Development and Solution Examples] Semiconductor Manufacturing Related

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last updated：Jul 24, 2018

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Change the parts from resin to metal and propose a coating using fluororesin!

This is an introduction to development and solution examples related to semiconductor manufacturing. Fluororesin molded products are used for the chemical resistance and high purity of parts that make up semiconductor manufacturing equipment. However, for parts that require mechanical strength, it was not possible to use fluororesin molded products alone. Therefore, our company proposed changing the parts from resin to metal and applying a coating of fluororesin, which excels in chemical resistance and high purity, to the metal parts. [Challenges] ■ Application: Semiconductor manufacturing related ■ Fluororesin molded products alone cannot be used for parts that require mechanical strength *For more details, please feel free to contact us.

Related Link - http://www.nf-technocoat.com/example/index.html

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[Proposal] ■ We propose changing the parts from resin to metal and applying a fluororesin coating that excels in chemical resistance and high purity to the metal parts. <Benefits of adopting our fluororesin coating> - The use of metal parts becomes possible, ensuring mechanical strength. - Chemical resistance is secured, preventing deterioration of the equipment due to corrosive environments. - High purity is ensured, preventing contamination of the equipment due to metal ion leaching. - Water repellency is secured, reducing the adhesion of residual chemicals and contaminants. *Please note that chemical resistance and high purity may vary depending on the semiconductor manufacturing process, so we will select the specifications for the fluororesin coating after consultation. *For more details, please feel free to contact us.

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Applications/Examples of results

【Achievements】 ■Semiconductor cleaning equipment ■CMP equipment ■Resist coating and drying equipment *For more details, please feel free to contact us.