We would like to introduce an interview article with Mr. Kazuo Kibi from Tokyo Electron Limited!
We would like to introduce information about how CAE and CFD are beneficial to society, as well as interesting application examples, primarily through articles from the information magazine "ADVANTAGE" published by ANSYS, Inc. and ANSYS Japan Co., Ltd. This time, we will present an interview article with Mr. Kazuo Kibi from Tokyo Electron Limited. The company holds the top share in Japan and the third-largest share in the world as a semiconductor manufacturing equipment manufacturer. As a long-time user of ANSYS Fluent, the company utilizes simulation to clarify and predict phenomena occurring within their manufacturing equipment. They use simulation software from upstream to downstream in the design process, but now the management has given them a more challenging mission: "to create prototypes without making them." Creating prototypes requires enormous costs and time. Therefore, if they can avoid making prototypes, there is no doubt that they will gain significant economic and time benefits. *For more details, please download the PDF or contact us.
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basic information
In the "front-end" of the semiconductor device manufacturing process, fine processing down to the scale of several nanometers is performed not by cutting with tools, but by combining various physical and chemical reactions. To create such reaction phenomena, it is necessary to elucidate the "flow," so we considered the introduction of thermal fluid analysis tools and, as a result of our verification, selected the ANSYS Fluent solver from among several tools. The most important aspect of simulation software is the reliability of the solver. Another significant factor is service support. Additionally, improvements in the GUI, support for environmental infrastructure, and expansion into cloud services have allowed us to maintain a long-term relationship. *For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
【Purpose】 ■Efficiency in circuit design *For more details, please refer to the PDF document or feel free to contact us.
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Company information
While focusing on MBD and CAE technologies and their surrounding technical areas, we specialize in building virtual products and collaborative design processes through cutting-edge digital engineering. We form partnerships with leading-edge software vendors of the era, providing a comprehensive engineering environment necessary to solve our customers' increasingly diverse and complex challenges using top-level domestic digital engineering technologies, including thermal fluid analysis, structural analysis, electromagnetic field analysis, acoustic analysis, system simulation, optimization technologies, embedded software development environments, and simulation process data management (SPDM) solutions.
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