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  6. OGEP Processing - OGEP-V3 -

OGEP Processing - OGEP-V3 -

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last updated:Apr 20, 2018

オジックテクノロジーズ
オジックテクノロジーズ
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Electropolishing that suppresses the generation of corrosive gases and emitted gases.

OGEP-V3 processing is an electrolytic polishing method that can be applied to aluminum and stainless steel chambers (austenitic and martensitic). It can be used for semiconductor manufacturing equipment parts and has the effect of suppressing the release of gases generated during vacuum conditions in vacuum devices. While electrolytic polishing generates corrosive "sulfur gas," OGEP processing does not produce this gas. There are two types of OGEP processing: "OGEP-Al" for aluminum and "OGEP-SUS" for stainless steel. Keywords: electrolytic polishing, sulfur, sulfa, gloss, leveling, corrosion resistance, burr removal, burn removal, precision cleaning, smoothness. ● For more details, please contact us. E-mail: ogic@ogic.ne.jp Phone number: 096-352-4450

    Aluminum Mirrorothers
オジープ

OGEP Processing - OGEP-V3 -

オジープ 比較図.png
オジープ 比較図.png
  • Related Link - http://www.ogic.ne.jp/high.html#02

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Features: * Does not corrode because the emitted gas does not contain sulfur (sulfur content) * Shorter time required for vacuuming due to low gas emission * Improved corrosion resistance due to the formation of a thin oxide film on the surface compared to the raw material * Film thickness can be freely controlled * Uniform polishing possible even in corner areas * Good gloss and leveling (Depending on the processing state of the material, a glossy surface with gloss values of 100 to over 1000 can be achieved.) Features of "Ojipe-Al": - Mirror polishing is possible even at room temperature - Treatment solution does not contain halogens or chromium (environmentally friendly) Features of "Ojipe-SUS": - Corrosion resistance can be expected with SUS304 (see diagram) - Polishing of cold materials and martensitic SUS is also possible - Does not generate NOx gases (environmentally friendly)

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【Use Case】Reduction of Corrosive Gases (Sulfur Gas) *Issues Using stainless steel and aluminum as they are in vacuum chambers results in a high amount of emitted gases, making it unsuitable for high vacuum conditions. Although electropolishing can reduce the amount of emitted gases, it can also lead to the generation of corrosive gases. *Proposed Solution We recommend the Ojipe treatment. The Ojipe treatment can significantly reduce the amount of corrosive gases and emitted gases through a uniquely developed treatment solution. This prevents corrosion within the equipment during vacuum conditions.

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オジックテクノロジーズ

オジックテクノロジーズ

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We believe that our mission is to evolve and propose surface treatment technologies, which are foundational technologies for manufacturing, have a history dating back to ancient times, and have evolved to support cutting-edge industries of each era, but are now becoming skills that not everyone can perform. This evolution begins with communication with our customers. We learn about the materials our customers use, understand the required functional characteristics, and study the environment in which the finished products will be used and the roles they are expected to fulfill. If necessary, we collaborate with universities and public research institutions. We then provide the optimal surface treatment technology.

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