Plasma-resistant O-ring Fluoro Power DPR (special fluorine rubber)
O-ring Fluoro Power DPR (Plasma-resistant material)
Special material (fluororubber + fluororesin) without the use of a compound material, using O-ring cherry seals.
This is a special material that has excellent plasma resistance while maintaining a high cost advantage. Because it does not use any blending agents, it excels in low particle generation and demonstrates excellent plasma resistance in dry processes for semiconductors and liquid crystal-related equipment. It is effective as a lower-tier alternative to the non-filler type heat-resistant perfluoro material "FluoroPower FFN (FFKM-Plasma Resistant)." Sakura Seal Co., Ltd. offers a wide variety of O-rings, ranging from extremely small O-rings to large diameter rings, in both general standard sizes according to JIS standards and various other sizes, supporting appropriate O-ring selection in terms of both material and size. * Various types of fluororubber, including perfluoro, are the materials that Sakura Seal Co., Ltd. specializes in the most. * We also accommodate shapes other than O-rings.
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basic information
It is a special material that combines fluororesin and fluororubber, offering excellent plasma resistance while keeping the price low. Hardness A65±5. Black color. Temperature range 0 to 200°C.
Price information
Prices may vary depending on quantity and dimensions, so please feel free to contact us.
Delivery Time
P4
※In principle, stock items are available for immediate delivery, but the delivery time may vary depending on quantity and dimensions.
Applications/Examples of results
O-rings, packing, gaskets. These materials exhibit excellent plasma resistance in dry processes related to semiconductors and liquid crystal equipment.
Line up（12）
| Model number | overview |
|---|---|
| P Specification | This is a specification used for motion, cylindrical surface fixation, and flat surface fixation as defined by JIS B2401. |
| G Specification | This is a specification used for cylindrical surface fixation and flat surface fixation as defined by JIS B2401. |
| GS Specification | This is a specification used for cylindrical surface fixation and flat surface fixation. |
| V Specification | This is a specification corresponding to the vacuum flange standard of JIS B2290. |
| S Specification | This is a specification mainly used for cylindrical surface fixation, flat surface fixation, or in small spaces. |
| SS Specification | This is a specification mainly used for cylindrical surface fixation, flat surface fixation, or in small spaces. |
| AN6227 Specification | This is an old JIS WP1516 specification used for motion and cylindrical surface fixation. |
| AN6230 Specification | This is an old JIS WG1517 specification used for cylindrical surface fixation. |
| AS568 Specification | This is the ARP568 specification, which is the U.S. O-ring standard specification. |
| JASOF404 Specification | This is a specification used for motion and fixation as defined by the automotive standard (JASO). |
| Non-standard O-ring | This is an O-ring manufactured using dedicated molds or through continuous vulcanization (continuous baking). |
| Others | We also manufacture special shaped products. Please feel free to contact us. |
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Company information
Sakura Seal Co., Ltd. is a seal product manufacturer that specializes in the production and sale of various sealing products, primarily O-rings, oil seals, and gaskets. We are particularly skilled in molded products made from fluororubber, and we offer a wide range of high-performance materials with special properties, including not only general-purpose FKM materials but also FFKM materials. With our deep knowledge of various sealing products, we maintain a stock of over 20,000 types, even within Tokyo, and strive to remain an organization that provides high convenience for industries and society.