Easy to handle and easy to maintain.
A series of dry vacuum pumps with excellent cost performance.
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basic information
【Features】 ○ Available in built-in controller type (TD) and separate controller type (TDN), as well as the economical E type that does not require N2 gas ○ Exhaust speed (l/min): 650 to 3000 ○ Reachable pressure (Pa): up to 0.7 ○ Excellent operability and various protection functions through sequencer control ○ Remote operation and monitoring via external signals are also possible ○ Pump operation, stop, and operating status displayed on the controller ● For more details, please contact us or download the catalog.
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Applications/Examples of results
Semiconductor manufacturing process FPD manufacturing process Solar cell manufacturing process
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In the Industrial Division, we have a proven track record of delivering a wide range of products, including our highly regarded dry vacuum pumps, to various facilities and factories, including social infrastructure. Our unique design philosophy and advanced production technology have led to the development of the "DaiKo's unique screw shape (QueenBeeScrew)," which achieves the world's best low-speed operation and excellent exhaust performance. This has resulted in widespread adoption in the manufacturing processes of semiconductors, LCD panels, solar cells, and lithium-ion batteries, as well as in a broad range of industries such as freeze-drying in pharmaceutical manufacturing and vacuum distillation in chemical production. For roots blowers, we offer a wide variety of models that can accommodate low to high pressure and air to special gases, backed by our technical capabilities and a responsive staff structure to meet all customer demands in a timely manner. Our vision is "A Challenge to the World's Highest Quality." The strength that forms the TAIKO brand lies in the balanced functionality of three elements: "Technology," "Quality Control," and "After-Sales Service." This means that we are capable of consistently manufacturing and supplying good products while continuously supporting our customers, representing a comprehensive strength.