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Fテクニカルサポート

addressKanagawa/Kawasaki-shi, Kawasaki-ku/2-9-20 Hinode
phone044-299-3595
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HVPE (Hydride Vapor Phase Epitaxy) equipment for GaN self-sustaining substrate growth

Leave it to us for anything related to semiconductor equipment.

The "GaN Self-Supporting Substrate Growth HVPE Device" is a system that utilizes a substrate rotation mechanism developed uniquely by our company. The heater features a split-type 12-zone control. It employs a total control system from MicroLogic. Please feel free to contact us if you have any inquiries. 【Device Configuration】 ■ 3 inches x 3 pieces (MAX) ■ Split-type 12-zone control ■ N2 atmosphere loading BOX ■ Substrate rotation mechanism ■ Automatic opening and closing movable heater ■ Equipped with a total control system *For more details, please download the PDF or feel free to contact us.

  • Manufacturing Equipment

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