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The "Ceria Slurry" used in semiconductor CMP processes is a suspension made by mixing particles of 80 to 300 nm with ultra-pure water and chemicals. It serves the role of polishing the film quality of the target material both scientifically and mechanically. Additionally, the "Additive" used together with the Ceria Slurry during polishing enables selective polishing required in semiconductor processes, depending on the film quality. 【Features】 ■ Excellent stability of the slurry at low and high temperatures ■ Minimal particle agglomeration ■ Superior usability when mixed with additives ■ High polishing rate ■ Excellent control capabilities for defects, scratches, and dishing *For more details, please refer to the PDF document or feel free to contact us.
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Free membership registrationOur company offers the ultra-high efficiency "Valve Rotary VOC (Regenerative Thermal Oxidizer)" compared to the conventional multi-tower (2-tower, 3-tower) rotary systems. The treatment efficiency significantly decreases if even a small amount of high-concentration INLET gas or purge gas contaminates the system. The valve system minimizes this possibility. This device allows for mode switching based on production conditions, enabling flexible responses. It also disperses the impact of valve failures, resulting in minimal disruption to operations. Additionally, the low pressure loss allows for cost reduction. 【Features】 ■ Ultra-high efficiency ■ Flexible response capability ■ Minimization of risks ■ High thermal recovery rate ■ Low pressure loss ■ Easy maintenance *For more details, please refer to the PDF document or feel free to contact us.
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Free membership registrationWe offer a hybrid dust collector that achieves high dust collection efficiency through the introduction of a swirling gas flow from our newly developed cyclone hopper. Coarse dust is captured through inertial impact separation and centrifugal separation (cyclone) in the primary dust collection section, significantly reducing the dust load in the secondary dust collection section (bag filter), thereby greatly enhancing dust collection efficiency. 【Features】 ■ High dust collection efficiency ■ Compact can body reduces installation space ■ Expanded filtration area with pleated filter adoption ■ Modular design allows for rearrangement and expansion ■ High energy-saving effect *For more details, please download the PDF or feel free to contact us.
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