SCREEN SPE クォーツ List of Products and Services

SCREEN SPE Quartz Co., Ltd. offers "large-scale quartz processing." We supply quartz processing products compatible with 300mm wafers, including furnace core tubes (outer, inner, double tubes) and boats and caps. Additionally, leveraging the properties of quartz, such as high purity and excellent heat and chemical resistance, we develop and manufacture a variety of quartz glass products, including large bell jars and chambers exceeding 1,000mm in diameter for etching and ashing, as well as quartz chambers for lamp annealing, all under reliable processing technology and quality control. 【Features】 ■ Advanced equipment to meet various needs - Introduced automatic forming lathes to accommodate a wide range of tube products, both large and small - Established a production line for synthetic quartz products with purity far exceeding that of fused quartz ■ High precision and durability of large chambers created by advanced technology and production equipment - Achieved the manufacture of large quartz containers (BIG CHAMBER) such as square or large-diameter tubes, which were previously difficult to process *For more details, please refer to the PDF document or feel free to contact us.

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SCREEN SPE Corporation Quartz specializes in "quartz processing." In addition to quartz tanks, we supply high-precision and high-quality products such as robot chucks and wafer guides for delicate wafers that come into direct contact with them. We also develop and manufacture a variety of quartz glass products, including inline heaters for heating chemicals in chemical processing tanks. 【Features】 - Actively developing and manufacturing components for wafer thermal processing equipment, including boats and tubes. - Digitizing and long-term storing all drawings and process details. - Responding quickly to maintenance needs and supplying products with the same precision for additional orders. - Recording the full names of all engineers and inspectors involved in the formation in the data. *For more details, please refer to the PDF materials or feel free to contact us.

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This catalog is a collection of examples showcasing solutions for large chambers that are essential for next-generation industries, including clean energy. Our company has maximized the expertise in processing quartz glass that we have cultivated over many years to achieve the manufacturing of large quartz containers (BIG CHAMBER) that were traditionally difficult to process, such as square or large-diameter tubes. We will continue to evolve existing technologies, promote the creation of new technological capabilities, and challenge ourselves to realize all kinds of BIG CHAMBERS. 【Application Fields】 ■ LCD Panels ■ Solar Power Generation ■ Clean Energy ■ LED *For more details, please refer to the catalog or feel free to contact us.

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At SCREEN SPE Corporation's Iwaki factory, the slicing business primarily focuses on the cutting and processing of large mask blank materials for LCDs. Additionally, we accommodate slicing processing for all functional materials, including cutting of crystal materials that require high yield and high surface precision. Our unique cutting method minimizes the occurrence of saw marks and guarantees reduced load for the next process with high flatness. 【Business Content】 ■ Cutting and processing of large mask blank materials for LCDs *For more details, please refer to our catalog or feel free to contact us.

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At SCREEN SPE Co., Ltd., the Iwaki factory processing business handles the processing of quartz products used in the thermal treatment and etching processes of semiconductor manufacturing lines. In addition, we conduct research and development to accommodate the processing of various products that are becoming larger and more refined, including solar cells, optical-related products, and medical biotechnology. We respond to various needs with state-of-the-art equipment. 【Business Overview】 ■ Manufacturing and processing of quartz products for semiconductor manufacturing equipment *For more details, please refer to our catalog or feel free to contact us.

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The Koriyama factory of SCREEN SPE Co., Ltd., which is owned by Quartz, has been a production base since its establishment in the field of semiconductor manufacturing equipment. It is actively engaged in the development and manufacturing of processing tanks (quartz tanks) for semiconductor wafer cleaning. Within the factory, where a high level of cleanliness is maintained, each process from material procurement to product shipment functions consistently, establishing a safe and efficient production system. Additionally, leveraging the properties of quartz, which has a high softening point of approximately 1,700°C, we are also actively involved in the development and manufacturing of components for wafer thermal processing equipment, including boats and tubes. [Business Description] ■ Manufacturing and processing of quartz tanks and related components for semiconductor cleaning equipment *For more details, please refer to the catalog or feel free to contact us.

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SCREEN SPE Quartz Co., Ltd. is a company primarily engaged in the processing of quartz glass products and slicing operations. By addressing challenges in semiconductor manufacturing at a high level, we have consistently achieved high customer satisfaction. Additionally, to provide products quickly, we have established a comprehensive system, including service stations located nationwide. Furthermore, we respond to customer needs with a wide range of production capabilities, including enhancing new manufacturing lines to meet the demands of the times. 【Business Activities】 ■ Processing of quartz glass products - Manufacturing and processing of quartz tanks and related parts for semiconductor cleaning equipment - Manufacturing and processing of quartz products for semiconductor manufacturing equipment ■ Slicing operations - Cutting and processing of large mask blank materials for LCDs *For more details, please refer to our catalog or feel free to contact us.

• Solar power generation equipment