Gas purification filter "02K series"
Maximum flow rate 100 slpm; nominal flow rate 20 slpm!
The "02K Series" is a room temperature gas purifier that is a gas purification filter capable of removing impurities in gas to less than 1 ppb in most cases. It is designed to remove impurities from various gases, including nitrogen, noble gases, hydrogen, ammonia, arsine, phosphine, HCl, and others. Please feel free to contact us if you have any requests. 【Features】 ■ Lifespan - Approximately 1 year based on a standard flow rate with 5N5 (99.9995%) gas as a reference. (For specific lifespan details, please inquire.) *For more information, please download the PDF or contact us.
- 企業:アップ・テック・ジャパン
- 価格:Other